Planar grating
Planar Grating
Planar grating
Measurement System
The ASPG series planar gratings are measurement systems designed for ultra-precise 2D positioning applications, utilizing diffraction grating principles to enable synchronized X/Y axis measurement. Featuring nanometer-level resolution, large measuring range, and high stability, these gratings are widely used in precision coordinate measuring machines, lithography equipment, precision machining centers, semiconductor manufacturing tools, and other ultra-precision positioning scenarios. Available in both absolute and incremental types, the planar gratings support multiple interface protocols and integrate seamlessly with mainstream motion control systems.
Key Features
- •2D Plane Measurement: Dual-axis X/Y synchronous measurement for precise 2D positioning.
- •Nanometer-scale resolution: Up to 1 nm for ultra-precision machining.
- •High-range measurement: Single-axis range up to 1000mm, supporting large-travel applications
- •High Stability: Constructed from low-expansion coefficient materials for minimal thermal drift.
- •Multiple Types: Choose between absolute and incremental
- •Rich interface: Supports BiSS-C, SSI, EnDat2.2, and other protocols
- •High Protection Rating: IP54 protection for industrial environments
Technical Specifications
| No. | Technology Category | Parameters | Notes |
|---|---|---|---|
| 1 | Measurement Principle | Principle of Diffraction Grating | X/Y Dual-Axis Synchronous Measurement |
| 2 | Resolution | Up to 1nm | Nanometer-precision measurement |
| 3 | Measurement Range | X/Y axis 0-1000mm | Large-range 2D measurement |
| 4 | Accuracy Class | ±0.5 μm/m | Ultra-high-precision positioning |
| 5 | Repeatability | ±0.2 μm/m | Long-term consistency |
| 6 | Coefficient of thermal expansion | 0±0.5×10⁻⁶/K | Low coefficient of thermal expansion material with minimal temperature drift |
| 7 | Interface Protocol | BiSS-C / SSI / EnDat2.2 | Supports multiple mainstream interfaces |
| 8 | Protection Rating | IP54 | Designed for industrial environments |
| 9 | Operating Temperature | 0℃~45℃ | Environmental temperature requirements for precision measurement |
| 10 | Storage temperature | -20℃~60℃ | Non-operating storage conditions |
| 11 | Humidity | < 80% non-condensing | Avoid accuracy issues caused by humid environments |
| 12 | Vibration-resistant | Max 50 m/s² | Industrial anti-interference capability |
| 13 | Grating Type | Absolute / Incremental | Two types available |
| 14 | Installation Method | Screw Mount / Adhesive Backing | Flexible Installation Options |
Selection Guide
| Product Model | Core Specifications | Use Cases |
|---|---|---|
| ASPG-300300-A | Range 300×300mm, absolute | Precision coordinate measuring and processing equipment for small to medium-sized enterprises |
| ASPG-500500-A | Range 500×500mm, absolute | Medium-sized precision measurement equipment, lithography machine worktables |
| ASPG-10001000-A | Range 1000×1000mm, absolute | Large-scale precision measurement equipment, semiconductor manufacturing equipment |
| ASPG-300300-I | Range 300×300mm, incremental | Cost-sensitive precision positioning applications |
| ASPG-500500-I | Range 500×500mm, incremental | Standard 2D Precision Measurement Scenarios |
Installation Instructions
1. Prepare the installation base:Ensure the installation base has a flatness of ≤0.01mm/m and is clean, free of oil/grease, and free of scratches.
2. Grating scale installation:Secure the scale with a dedicated fixture to ensure X/Y axis perpendicularity ≤ 0.005mm/m.
3. Installing the read head:Adjust the gap between the readhead and scale to the specified value, ensuring X/Y axis orthogonality.
4. Wiring Requirements:Use shielded cables with single-point grounding to avoid electromagnetic interference.
5. System Debugging:Access control system: Verify X/Y axis signals and complete precision calibration.
6. Routine Maintenance:Regularly clean the grating scale surface and check that mounting screws are tightened.
